Interface characteristics comparison of sapphire direct and indirect wafer bonded structures by transmission electron microscopy
| Autor: | Li, Wangwang, Liang, Ting, Liu, Wenyi, Lei, Cheng, Hong, Yingping, Li, Yongwei, Li, Zhiqiang, Xiong, Jijun |
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| Zdroj: | In Applied Surface Science 15 November 2019 494:566-574 |
| Databáze: | ScienceDirect |
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