Metal barrier induced damage in self-assembly based organosilica low-k dielectrics and its reduction by organic template residues
| Autor: | Krishtab, M., de Marneffe, J.-F., Armini, S., Meersschaut, J., Bender, H., Wilson, C., De Gendt, S. |
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| Zdroj: | In Applied Surface Science 15 August 2019 485:170-178 |
| Databáze: | ScienceDirect |
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