High-performance FET arrays enabled by improved uniformity of wafer-scale MoS2 synthesized via thermal vapor sulfurization

Autor: Wei, Junqing, Wang, Fang, Zhang, Baojun, Shan, Xin, Di, Xichao, Li, Yue, Feng, Yulin, Zhang, Kailiang
Zdroj: In Applied Surface Science 31 July 2019 483:1136-1141
Databáze: ScienceDirect