Towards fast nanopattern fabrication by local laser annealing of block copolymer (BCP) films
| Autor: | Zimmer, Klaus, Zajadacz, Joachim, Frost, Frank, Mayer, Andre, Steinberg, Christian, Chang, Hui-Fang, Cheng, Ji-Yen, Scheer, Hella-Christin |
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| Zdroj: | In Applied Surface Science 15 March 2019 470:639-644 |
| Databáze: | ScienceDirect |
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