Theoretical study of the laser annealing process in FinFET structures
| Autor: | Lombardo, S.F., Fisicaro, G., Deretzis, I., La Magna, A. ⁎, Curver, B., Lespinasse, B., Huet, K. |
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| Zdroj: | In Applied Surface Science 15 February 2019 467-468:666-672 |
| Databáze: | ScienceDirect |
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