Study on top sulfur hyperdoping layer covering microstructured Si by fs-laser irradiation
| Autor: | Wang, Ke, Gao, Jinsong, Yang, Haigui, Wang, Xiaoyi, Wang, Yanchao, Zhang, Zhuo |
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| Zdroj: | In Applied Surface Science 15 January 2019 464:502-508 |
| Databáze: | ScienceDirect |
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