Depth resolution and preferential sputtering in depth profiling of delta layers
| Autor: | Hofmann, S., Lian, S.Y., Han, Y.S., Liu, Y., Wang, J.Y. |
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| Zdroj: | In Applied Surface Science 15 October 2018 455:1045-1056 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Hofmann, S., Lian, S.Y., Han, Y.S., Liu, Y., Wang, J.Y. |
|---|---|
| Zdroj: | In Applied Surface Science 15 October 2018 455:1045-1056 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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