Surface chemistry of thermal dry etching of cobalt thin films using hexafluoroacetylacetone (hfacH)
| Autor: | Zhao, Jing, Konh, Mahsa, Teplyakov, Andrew |
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| Zdroj: | In Applied Surface Science 15 October 2018 455:438-445 |
| Databáze: | ScienceDirect |
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