Reactive bipolar pulsed dual magnetron sputtering of ZrN films: The effect of duty cycle
| Autor: | Rizzo, A., Valerini, D., Capodieci, L., Mirenghi, L., Di Benedetto, F., Protopapa, M.L. |
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| Zdroj: | In Applied Surface Science 1 January 2018 427 Part A:994-1002 |
| Databáze: | ScienceDirect |
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