Fabrication of large-area high-aspect-ratio periodic nanostructures on various substrates by soft X-ray interference lithography

Autor: Xue, Chaofan, Zhao, Jun, Wu, Yanqing, Yu, Huaina, Yang, Shumin, Wang, Liansheng, Zhao, Wencong, Wu, Qiang, Zhu, Zhichao, Liu, Bo, Zhang, Xia, Zhou, Wenchao, Tai, Renzhong
Zdroj: In Applied Surface Science 15 December 2017 425:553-557
Databáze: ScienceDirect
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