Front and back side SIMS analysis of boron-doped delta-layer in diamond
| Autor: | Pinault-Thaury, M.-A., Jomard, F., Mer-Calfati, C., Tranchant, N., Pomorski, M., Bergonzo, P., Arnault, J.-C. |
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| Zdroj: | In Applied Surface Science 15 July 2017 410:464-469 |
| Databáze: | ScienceDirect |
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