Nanocharacterization of the adhesion effect and bending stiffness in optical MEMS
| Autor: | Pustan, Marius, Birleanu, Corina, Dudescu, Cristian |
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| Zdroj: | In Applied Surface Science 1 November 2017 421 Part A:191-199 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Pustan, Marius, Birleanu, Corina, Dudescu, Cristian |
|---|---|
| Zdroj: | In Applied Surface Science 1 November 2017 421 Part A:191-199 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect