Systematic investigation of the properties of TiO2 films grown by reactive ion beam sputter deposition
| Autor: | Bundesmann, C., Lautenschläger, T., Spemann, D., Finzel, A., Thelander, E., Mensing, M., Frost, F. |
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| Zdroj: | In Applied Surface Science 1 November 2017 421 Part B:331-340 |
| Databáze: | ScienceDirect |
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