Homogeneous transparent conductive ZnO:Ga by ALD for large LED wafers
| Autor: | Szabó, Zoltán, Baji, Zsófia, Basa, Péter, Czigány, Zsolt, Bársony, István, Wang, Hsin-Ying, Volk, János |
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| Zdroj: | In Applied Surface Science 30 August 2016 379:304-308 |
| Databáze: | ScienceDirect |
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