Remote plasma cleaning of optical surfaces: Cleaning rates of different carbon allotropes as a function of RF powers and distances
| Autor: | Cuxart, M. González, Reyes-Herrera, J., Šics, I., Goñi, A.R., Fernandez, H. Moreno, Carlino, V., Pellegrin, E. |
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| Zdroj: | In Applied Surface Science 30 January 2016 362:448-458 |
| Databáze: | ScienceDirect |
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