Thermal post-deposition treatment effects on nanocrystalline hydrogenated silicon prepared by PECVD under different hydrogen flow rates
| Autor: | Amor, Sana Ben, Meddeb, Hosny, Daik, Ridha, Othman, Afef Ben, Slama, Sonia Ben, Dimassi, Wissem, Ezzaouia, Hatem |
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| Zdroj: | In Applied Surface Science 1 January 2016 360 Part B:572-578 |
| Databáze: | ScienceDirect |
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