RF plasma enhanced MOCVD of yttria stabilized zirconia thin films using octanedionate precursors and their characterization
| Autor: | Chopade, S.S., Nayak, C., Bhattacharyya, D., Jha, S.N., Tokas, R.B., Sahoo, N.K., Deo, M.N., Biswas, A., Rai, Sanjay, Thulasi Raman, K.H., Rao, G.M., Kumar, Niranjan, Patil, D.S. |
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| Zdroj: | In Applied Surface Science 15 November 2015 355:82-92 |
| Databáze: | ScienceDirect |
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