Electric and pyroelectric properties of AlN thin films deposited by reactive magnetron sputtering on Si substrate
| Autor: | Stan, G.E., Botea, M., Boni, G.A., Pintilie, I., Pintilie, L. |
|---|---|
| Zdroj: | In Applied Surface Science 30 October 2015 353:1195-1202 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect