Laser-assisted atom probe tomography of 15N-enriched nitride thin films for analysis of nitrogen distribution in silicon-based structure
| Autor: | Kinno, Teruyuki, Kitamoto, Katsuyuki, Takeno, Shiro, Tomita, Mitsuhiro |
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| Zdroj: | In Applied Surface Science 15 September 2015 349:89-92 |
| Databáze: | ScienceDirect |
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