Nucleation and initial growth of atomic layer deposited titanium oxide determined by spectroscopic ellipsometry and the effect of pretreatment by surface barrier discharge
| Autor: | Cameron, David C., Krumpolec, Richard, Ivanova, Tatiana V., Homola, Tomáš, Černák, Mirko |
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| Zdroj: | In Applied Surface Science 1 August 2015 345:216-222 |
| Databáze: | ScienceDirect |
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