Probing initial-stages of ALD growth with dynamic in situ spectroscopic ellipsometry
| Autor: | Muneshwar, Triratna, Cadien, Ken |
|---|---|
| Zdroj: | In Applied Surface Science 15 February 2015 328:344-348 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Muneshwar, Triratna, Cadien, Ken |
|---|---|
| Zdroj: | In Applied Surface Science 15 February 2015 328:344-348 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect