Improved patterning of ITO coated with gold masking layer on glass substrate using nanosecond fiber laser and etching

Autor: Tan, Nguyen Ngoc, Hung, Duong Thanh, Anh, Vo Tran, BongChul, Kang, HyunChul, Kim
Zdroj: In Applied Surface Science 1 May 2015 336:163-169
Databáze: ScienceDirect