Laser annealing of plasma-damaged silicon surface
| Autor: | Sameshima, T., Hasumi, M., Mizuno, T. |
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| Zdroj: | In Applied Surface Science 1 May 2015 336:73-78 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Sameshima, T., Hasumi, M., Mizuno, T. |
|---|---|
| Zdroj: | In Applied Surface Science 1 May 2015 336:73-78 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect