Spectroscopic ellipsometry characterization of amorphous and crystalline TiO2 thin films grown by atomic layer deposition at different temperatures
| Autor: | Saha, D., Ajimsha, R.S., Rajiv, K., Mukherjee, C., Gupta, M., Misra, P., Kukreja, L.M. |
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| Zdroj: | In Applied Surface Science 1 October 2014 315:116-123 |
| Databáze: | ScienceDirect |
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