Incubation and nanostructure formation on n- and p-type Si(1 0 0) and Si(1 1 1) at various doping levels induced by sub-nanojoule femto- and picosecond near-infrared laser pulses
Autor: | Schüle, M., Afshar, M., Feili, D., Seidel, H., König, K., Straub, M. |
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Zdroj: | In Applied Surface Science 30 September 2014 314:21-29 |
Databáze: | ScienceDirect |
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