Incubation and nanostructure formation on n- and p-type Si(1 0 0) and Si(1 1 1) at various doping levels induced by sub-nanojoule femto- and picosecond near-infrared laser pulses

Autor: Schüle, M., Afshar, M., Feili, D., Seidel, H., König, K., Straub, M.
Zdroj: In Applied Surface Science 30 September 2014 314:21-29
Databáze: ScienceDirect