The effect of nitrogen incorporation in DLC films deposited by ECR Microwave Plasma CVD
| Autor: | Seker, Z., Ozdamar, H., Esen, M., Esen, R., Kavak, H. |
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| Zdroj: | In Applied Surface Science 30 September 2014 314:46-51 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Seker, Z., Ozdamar, H., Esen, M., Esen, R., Kavak, H. |
|---|---|
| Zdroj: | In Applied Surface Science 30 September 2014 314:46-51 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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