DC-magnetron sputtering of ZnO:Al films on (00.1)Al2O3 substrates from slip-casting sintered ceramic targets

Autor: Miccoli, I., Spampinato, R., Marzo, F., Prete, P., Lovergine, N.
Zdroj: In Applied Surface Science 15 September 2014 313:418-423
Databáze: ScienceDirect