The addition of aluminium to ruthenium liner layers for use as copper diffusion barriers
| Autor: | McCoy, A.P., Bogan, J., Walsh, L., Byrne, C., Casey, P., Hughes, G. |
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| Zdroj: | In Applied Surface Science 15 July 2014 307:677-681 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect