Cross-sectional study of high spatial frequency ripples performed on silicon using nanojoule femtosecond laser pulses at high repetition rate
| Autor: | Le Harzic, R., Menzel, M., Henning, S., Heilmann, A., Stracke, F., Zimmermann, H. |
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| Zdroj: | In Applied Surface Science 30 June 2014 305:670-673 |
| Databáze: | ScienceDirect |
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