Impact of Gd2O3 passivation layer on interfacial and electrical properties of atomic-layer-deposited ZrO2 gate dielectric on GaAs
| Autor: | Gong, Youpin, Zhai, Haifa, Liu, Xiaojie, Kong, Jizhou, Wu, Di, Li, Aidong |
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| Zdroj: | In Applied Surface Science 1 February 2014 291:35-39 |
| Databáze: | ScienceDirect |
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