Investigation of thermally grown oxide on 4H-SiC by a combination of H2O and HNO3 vapor with varied HNO3 solution heating temperature
| Autor: | Poobalan, Banu, Moon, Jeong Hyun, Kim, Sang-Cheol, Joo, Sung-Jae, Bahng, Wook, Kang, In Ho, Kim, Nam-Kyun, Cheong, Kuan Yew |
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| Zdroj: | In Applied Surface Science 15 November 2013 285 Part B:795-804 |
| Databáze: | ScienceDirect |
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