Study of spatial homogeneity and nitridation of an Al nanopattern template with spectroscopic photoemission and low energy electron microscopy

Autor: Qi, B., Ólafsson, S., Zakharov, A.A., Göthelid, M., Agnarsson, B., Gislason, H.P.
Zdroj: In Applied Surface Science 1 January 2013 264:349-357
Databáze: ScienceDirect