The influences of high energetic oxygen negative ions and active oxygen on the microstructure and electrical properties of ZnO:Al films by MF magnetron sputtering
| Autor: | Hao, Changshan, Xie, Bin, Li, Ming, Wang, Haiqian, Jiang, Yousong, Song, Yizhou |
|---|---|
| Zdroj: | In Applied Surface Science 1 August 2012 258(20):8234-8240 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect