Mass transfer in “metal layer–silicon substrate” systems under the action of compression plasma flows
| Autor: | Uglov, V.V., Kudaktsin, R.S., Petukhou, Yu.A., Kvasov, N.T., Punko, A.V., Astashynski, V.M., Kuzmitski, A.M. |
|---|---|
| Zdroj: | In Applied Surface Science 15 July 2012 258(19):7377-7383 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect