Identification of nanoscale structure and morphology reconstruction in oxidized a-SiC:H thin films
| Autor: | Vasin, A.V., Rusavsky, A.V., Nazarov, A.N., Lysenko, V.S., Lytvyn, P.M., Strelchuk, V.V., Kholostov, K.I., Bondarenko, V.P., Starik, S.P. |
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| Zdroj: | In Applied Surface Science 1 November 2012 260:73-76 |
| Databáze: | ScienceDirect |
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