Thermal etching of SiC
| Autor: | van der Berg, N.G., Malherbe, Johan B., Botha, A.J., Friedland, E. |
|---|---|
| Zdroj: | In Applied Surface Science 15 May 2012 258(15):5561-5566 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | van der Berg, N.G., Malherbe, Johan B., Botha, A.J., Friedland, E. |
|---|---|
| Zdroj: | In Applied Surface Science 15 May 2012 258(15):5561-5566 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect