The influences of plasma ion bombarded on crystallization, electrical and mechanical properties of Zn–In–Sn–O films

Autor: Chen, K.J., Hung, F.Y., Chang, S.J., Liao, J.D., Weng, C.C., Hu, Z.S.
Zdroj: In Applied Surface Science 15 November 2011 258(3):1157-1163
Databáze: ScienceDirect