The influences of plasma ion bombarded on crystallization, electrical and mechanical properties of Zn–In–Sn–O films
Autor: | Chen, K.J., Hung, F.Y., Chang, S.J., Liao, J.D., Weng, C.C., Hu, Z.S. |
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Zdroj: | In Applied Surface Science 15 November 2011 258(3):1157-1163 |
Databáze: | ScienceDirect |
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