The structure, surface topography and mechanical properties of Si–C–N films fabricated by RF and DC magnetron sputtering
| Autor: | Shi, Zhifeng, Wang, Yingjun, Du, Chang, Huang, Nan, Wang, Lin, Ning, Chengyun |
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| Zdroj: | In Applied Surface Science 1 December 2011 258(4):1328-1336 |
| Databáze: | ScienceDirect |
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