Structural and optical properties of RF magnetron sputtered aluminum nitride films without external substrate heating
| Autor: | Singh, Atul Vir, Chandra, Sudhir, Srivastava, A.K., Chakroborty, B.R., Sehgal, G., Dalai, M.K., Bose, G. |
|---|---|
| Zdroj: | In Applied Surface Science 2011 257(22):9568-9573 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect