Controlling precursor stability and evaporation through molecular design. Pseudo single source precursor approach to MOCVD SrTiO 3 thin films
Autor: | Seisenbaeva, Gulaim A., Gohil, Suresh, Kessler, Vadim G., Andrieux, Michel, Legros, Corinne, Ribot, Patrick, Brunet, M., Scheid, E. |
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Zdroj: | In Applied Surface Science 2011 257(6):2281-2290 |
Databáze: | ScienceDirect |
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