Temperature dependence of the sticking coefficient in atomic layer deposition
| Autor: | Rose, M., Bartha, J.W., Endler, I. |
|---|---|
| Zdroj: | In Applied Surface Science 2010 256(12):3778-3782 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Rose, M., Bartha, J.W., Endler, I. |
|---|---|
| Zdroj: | In Applied Surface Science 2010 256(12):3778-3782 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect