Influence of processing parameters on atmospheric pressure plasma etching of polyamide 6 films
Autor: | Gao, Zhiqiang, Peng, Shujing, Sun, Jie, Yao, Lan, Qiu, Yiping |
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Zdroj: | In Applied Surface Science 2009 255(17):7683-7688 |
Databáze: | ScienceDirect |
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