Partial crystallization of silicon by high intensity laser irradiation
Autor: | Azuma, Hirozumi, Sagisaka, Akito, Daido, Hiroyuki, Ito, Isao, Kadoura, Hiroaki, Kamiya, Nobuo, Ito, Tadashi, Nishimura, Akihiko, Ma, Jinglong, Mori, Michiaki, Orimo, Satoshi, Ogura, Koichi |
---|---|
Zdroj: | In Applied Surface Science 2009 255(24):9783-9786 |
Databáze: | ScienceDirect |
Externí odkaz: |