Influences of annealing temperature on the optical properties of SiO x thin film prepared by reactive magnetron sputtering

Autor: Huang, Feng, Song, Qiuming, Li, Ming, Xie, Bin, Wang, Haiqian, Jiang, Yousong, Song, Yizhou
Zdroj: In Applied Surface Science 2008 255(5) Part 1:2006-2011
Databáze: ScienceDirect