Influences of annealing temperature on the optical properties of SiO x thin film prepared by reactive magnetron sputtering
Autor: | Huang, Feng, Song, Qiuming, Li, Ming, Xie, Bin, Wang, Haiqian, Jiang, Yousong, Song, Yizhou |
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Zdroj: | In Applied Surface Science 2008 255(5) Part 1:2006-2011 |
Databáze: | ScienceDirect |
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