Growth, surface morphology, optical properties and electrical resistivity of ɛ-TiN x (0.4 < x ≤ 0.5) films
| Autor: | Kiran, M.S.R.N., Krishna, M. Ghanashyam, Padmanabhan, K.A. |
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| Zdroj: | In Applied Surface Science 2008 255(5) Part 1:1934-1941 |
| Databáze: | ScienceDirect |
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