Accuracy of calibrated depth by delta-doped reference materials in shallow depth profiling
| Autor: | Tomita, M., Tanaka, H., Koike, M., Kinno, T., Hori, Y., Yoshida, N., Sasaki, T., Takeno, S. |
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| Zdroj: | In Applied Surface Science 2008 255(4):1311-1315 |
| Databáze: | ScienceDirect |
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