Internal stresses and stability of the tetragonal phase in zirconia thin layers deposited by OMCVD
| Autor: | Benali, B., Huntz, A.M., Andrieux, M., Ignat, M., Poissonnet, S. |
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| Zdroj: | In Applied Surface Science 2008 254(18):5807-5813 |
| Databáze: | ScienceDirect |
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