Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen
| Autor: | Müllerová, J., Šutta, P., van Elzakker, G., Zeman, M., Mikula, M. |
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| Zdroj: | In Applied Surface Science 2008 254(12):3690-3695 |
| Databáze: | ScienceDirect |
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