Nitric acid method for fabrication of gate oxides in TFT
| Autor: | Mizushima, Shigeaki, Imai, Shigeki, Asuha, Tanaka, Masato, Kobayashi, Hikaru |
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| Zdroj: | In Applied Surface Science 2008 254(12):3685-3689 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Mizushima, Shigeaki, Imai, Shigeki, Asuha, Tanaka, Masato, Kobayashi, Hikaru |
|---|---|
| Zdroj: | In Applied Surface Science 2008 254(12):3685-3689 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect