Indium zinc oxide thin films deposited by sputtering at room temperature

Autor: Lim, Wantae, Wang, Yu-Lin, Ren, F., Norton, D.P., Kravchenko, I.I., Zavada, J.M., Pearton, S.J.
Zdroj: In Applied Surface Science 2008 254(9):2878-2881
Databáze: ScienceDirect